发明名称 METHOD OF MANUFACTURING FIELD EMISSION DISPLAY USING SELECTIVE POSITION CONTROL OF ELECTRON EMISSION SOURCE
摘要 <P>PROBLEM TO BE SOLVED: To provide a field emission display which precisely regulates the position of an electron emission source and is free from leakage between pixels. <P>SOLUTION: A photoresist layer 140 is formed on a cathode electrode 110 and a catalyst layer 130 which are formed on a substrate 100, and is sintered after pattern formation, and then holes are formed at predetermined positions. In the holes, carbon nanotubes 150 are grown using plasma CVD. Further, spacers 162 are formed directly on electrodes using a photoresist 160 for division into pixel units, and leakage between the pixels is prevented. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013016498(A) 申请公布日期 2013.01.24
申请号 JP20120180240 申请日期 2012.08.15
申请人 INDUSTRY ACADEMIC COOPERATION FOUNDATION OF KYUNGHEE UNIVERSITY 发明人 PARK KYU-CHAN;JANG JIN;LYU JAE HWAN
分类号 H01J9/02;H01J1/304;H01J29/04;H01J31/12 主分类号 H01J9/02
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