| 摘要 |
<p>The present invention relates to a horizontal and vertical moving device for a wafer probe. The horizontal and vertical moving device comprises: a base frame; a first horizontal driving unit mounted on a predetermined region of an upper surface of the base frame and driven so as to be movable along a first direction of a preset movable surface; a second horizontal driving unit mounted on an upper surface of the first horizontal driving unit and driven so as to be movable along a second direction of a movable surface vertical to the first direction; a lower vertical driving unit mounted on a central region of the upper surface of the base frame and driven so as to be movable along a direction vertical to the movable surface; an upper vertical driving unit which is fixed to and mounted on an upper surface of the second horizontal driving unit so as to be movable along the direction vertical to the movable surface, and which moves along first and second directions of the movable surface by means of the movement of the first and second horizontal driving units and which is mounted on an upper surface of the lower vertical driving unit and which moves in the vertical direction by means of the movement of the lower driving unit; and a control unit which controls the operations of the first horizontal driving unit, the second horizontal driving unit, the lower vertical driving unit, and the upper vertical driving unit.</p> |
