MANUFACTURING METHOD FOR MOLDS FOR NANOIMPRINTING

摘要

The present invention relates to a method for manufacturing m units (m is an integer equal to or greater than 1) of nanoimprinting molds, in each of which anodized alumina having a convexo-concave microstructure composed of multiple micropores is formed on a surface of an aluminum base material. The method includes one or more anodic oxidization steps, in which the aluminum base material is anodically oxidized in an electrolytic solution, with respect to each of the m units of aluminum base materials. In all the anodic oxidization steps, the difference (X - X0) between the aluminum concentration (X) in the electrolytic solution and the aluminum concentration (X0) in the electrolytic solution immediately before the first anodic oxidization step of the first aluminum base material is equal to or less than 1,000 ppm.