| 摘要 |
[Problem] To simplify adjustments to the position of a radiation antenna in a plasma generating apparatus in which plasma generated by electric discharge is expanded using electromagnetic waves. [Solution] A plasma generating apparatus (30) is equipped with an electromagnetic wave generating device (31), a radiation antenna (16), a high-voltage generator (14), and a discharge electrode (15). The radiation antenna (16) is disposed such that a discharge gap is formed relative to the discharge electrode (15), to which a high voltage outputted from the high-voltage generator (14) is applied. In the plasma generating device (30), discharge plasma is generated in the discharge gap by the output of a high voltage from the high-voltage generator (14), and the discharge plasma is expanded by outputting electromagnetic waves from the electromagnetic wave generating device (31) to emit the electromagnetic waves from the radiation antenna (16). |
