FILLER FOR FILLING A GAP, METHOD FOR PREPARING THIS AND METHOD FOR MANUFACTURING SEMICONDUCTOR CAPACITOR USING THE SAME

摘要

PURPOSE: A filter for filling a gap, a manufacturing method thereof, and a method for manufacturing a semiconductor capacitor are provided to improve the uniformity of a thickness and the dispersion of solutions by including surfactant of 0.001 to 10 weight%. CONSTITUTION: A mold oxide layer(3) is formed on a semiconductor substrate(1). A gap exposing a contact plug of a semiconductor substrate by the photolithography of the mold oxide layer. A conductive layer(5) is formed on the semiconductor substrate and the mold oxide layer. A filling layer(7) is formed on the conductive layer. The conductive layer located on the upper side of the mold oxide layer is partially removed.