| 摘要 |
PROBLEM TO BE SOLVED: To correctly acquire correction values for leak tests with a good workability. SOLUTION: Opening/closing valves 4a and 4b are set on branching passages 12a and 12b. Capsules 5a and 5b and capacity-changing means 20a and 20b are connected to the downstream side of the branching passages 12a and 12b. In a test mode, a work W is stored in the capsule 5a and a master member M is stored in the capsule 5b. A test pressure is supplied in a state with the opening/closing valves 4a and 4b being opened. A slight leak of the work W is detected on the basis of a detected differential pressure of a differential pressure sensor 6 after closing the opening/closing valves. Further, the capacity- changing means 20a and 20b are changed by an equal quantity to detect a large leak of the work W on the basis of the detected differential pressure of the differential pressure sensor 6. In a correction value acquirement mode, while the capsules 5a and 5b are made empty, the above control is carried out and the detected differential pressure after the capacity change is stored as the correction value. The large leak is determined on the basis of a value obtained by subtracting the correction value from the detected differential pressure after the capacity change in the test mode.
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