发明名称 METHOD FOR WORKING HEAD SLIDER AND HEAD SLIDER
摘要 PROBLEM TO BE SOLVED: To provide a method for working a head slider capable of highly precisely working a shape on an air inflow side of an air lubricating surface of the head slider. SOLUTION: When a deep groove part of the air lubricating surface is worked using at least two photo masks, positioning of an air outflow end photo mask 56 is performed at the air outflow end side to perform working by exposure, development and etching in a first step and an air inflow end photo mask 57 is offset in the longitudinal direction of a slider substrate Corresponding to the dispersion of the length of the slider substrate to perform working by exposure, development and etching so that the length from the air inflow end of the deep groove part is a prescribed value.
申请公布号 JP2001325707(A) 申请公布日期 2001.11.22
申请号 JP20000143883 申请日期 2000.05.16
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 AONO AKIFUMI;NAKAKITA MASARU
分类号 G11B5/60;G11B5/187;G11B21/21;(IPC1-7):G11B5/60 主分类号 G11B5/60
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