| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for creating drawing data and a drawing method by which a data amount of the drawing data for electron-beam or laser drawing is decreased and the period of time of creating the drawing data or the drawing time is shortened. Ž<P>SOLUTION: The method for creating drawing data to create drawing data of an electron-beam or laser drawing device from design data includes steps of: decomposing a pattern figure of the design data into a plurality of units of drawing basic figures; defining the perimeter of the basic figure as a closed figure represented by line segments and vertexes; defining a belt-like contour section with an optional width along the line segments, either the outside or the inside of the closed figure referring to the line segments or both of the outside and the inside; defining the inside of the contour section as an inner section; and obtaining the drawing data by representing each figure definition on one drawing data format. Ž<P>COPYRIGHT: (C)2009,JPO&INPIT Ž</p> |
