MICRO-ACTUATOR DEVICE CORRESPONDING TO PARTICLES ON CUT PLANE

摘要

PURPOSE: A micro-actuator element corresponding to particles on the cutting plane is provided to prevent wrong operation and damage by restricting discharge of particles from the micro-actuator. CONSTITUTION: A cut surface is created by cutting in a micro-actuator element(2), and is processed to prevent discharge of particles generated by cutting. The micro-actuator element is composed of a laminated body, and piezoelectric ceramic substances and inner electrodes are laminated alternately in the laminated body. The laminated body has the cut surface. The micro-actuator elements are mounted on the location between a fastened base plate(3) and a support spring(5) for supporting a head(4). The micro-actuator elements and the portion of the base plate and the support spring close to the micro-actuator elements are coated collectively with coating film.