发明名称 MOUNTING STRUCTURE OF POWER SUPPLY TERMINAL FOR CERAMIC HEATER USED FOR SEMICONDUCTOR INDUSTRY
摘要 PROBLEM TO BE SOLVED: To provide a mounting structure of a power supply terminal to the end part of a heating element which is suitable for keeping a stable operation of the ceramic heater for long time. SOLUTION: For the mounting structure of the power supply terminal for the ceramic heater, the ceramic heater is formed by mounting a heating element on a surface opposite to the heating surface of a ceramic base board, and electrically connected by fixing the power supply terminal to the heating element by clipping.
申请公布号 JP2002203660(A) 申请公布日期 2002.07.19
申请号 JP20000400413 申请日期 2000.12.28
申请人 IBIDEN CO LTD 发明人 ITO YASUTAKA
分类号 H05B3/20;H05B3/02;H05B3/16;(IPC1-7):H05B3/02 主分类号 H05B3/20
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