VAPOR DEPOSITION APPARATUS, METHOD FOR VAPOR DEPOSITION AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS

摘要

PURPOSE: A vapor deposition apparatus, method for vapor deposition, and a manufacturing method of an organic light emitting display apparatus are provided to be not influenced by each other thin film deposition processes by arranging two substrates on one stage in parallel. CONSTITUTION: A vapor deposition apparatus comprises a chamber(110), a stage(120), and an injection part(130). The chamber comprises an outlet(111). The stage is arranged in the chamber and has a plurality of mounting sides to mount a plurality of substrates(101,102). The injection part comprises at least one or more injection hole(131,132) which injects gas in a planar direction where the thin film of the substrate is formed.