ANTIMONY DIFFUSION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for diffusing antimony capable of further lower ing sheet resistance in a method for vapor-shape diffusing antimony on a silicon. SOLUTION: In an antimony diffusion method for flowing a heated and sublimed antimony trioxide in a diffusion furnace and diffusing antimony on a silicon, a surface area of the antimony trioxide exposed in the sublimation atmosphere is made large.