发明名称 THIN-FILM FORMING DEVICE
摘要 <p>This thin-film forming device includes: a deposition vessel in which a reduced-pressure deposition space, to which a raw material gas and a reactant gas are alternately supplied on different timings, is formed in order to form a thin film on the substrate; and a gas supply unit configured to supply the raw material gas and the reactant gas to the deposition vessel. The gas supply unit is provided with at least one partition that bends a gas passage from an inlet port of each of the raw material gas and the reactant gas toward the deposition space.</p>
申请公布号 EP2549524(A1) 申请公布日期 2013.01.23
申请号 EP20110755925 申请日期 2011.03.17
申请人 MITSUI ENGINEERING & SHIPBUILDING CO., LTD. 发明人 HATTORI, NOZOMU;MORI, YASUNARI
分类号 H01L21/31;C23C16/455 主分类号 H01L21/31
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