| 摘要 |
PURPOSE: A method and a device for sensing a substrate in an FPD manufacturing apparatus are provided to reduce a sensing distance by setting a sensing unit in the moving path of a gate valve assembly. CONSTITUTION: A sensing unit is installed at the moving path(102) of a gate valve assembly(100). The sensing unit senses the damage of a substrate. The sensing unit includes a laser sensor(200) and a reflecting plate(210). The sensing unit operates when a gate valve(110) opens gate slits(32,22) of chambers.
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