| 摘要 |
PURPOSE: A substrate inspecting apparatus and a substrate inspecting method are provided to evaluate the diverge of a measured resistance value of a wiring pattern by installing an evaluation unit sheet substrate. CONSTITUTION: A sheet substrate is formed by arranging a plurality of unit substrates having a plurality of wiring patterns. The conductivity of the wiring pattern of the unit board is evaluated inside the sheet substrate. A resistance measuring unit(17) measures a resistance value between a measured position on the wiring pattern through first and second inspecting tools. A control unit(11) uses a measurement unit sheet substrate.
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