| 摘要 |
A bipolar pulsed power supply is provided in which, while effectively restricting the rise in current at the time of arcing which directly leads to the generation of splashes and particles, the occurrence of overvoltage at the time of polarity reversal is prevented. The power supply has a bridge circuit constituted by switching elements SW1 through SW4 connected to positive and negative DC outputs from a DC power supply source. The operation of the switching elements is controlled to output in a bipolar pulsed mode at a predetermined frequency to a pair of electrodes which come into contact with a plasma. There is provided an output-characteristics-switching circuit which switches the output such that, when outputting to the electrodes, the output to the electrodes has initially constant-voltage characteristics and subsequent output to the electrodes has constant-current characteristics. |
