发明名称 APPARATUS FOR THE DEPOSITION OF SEMICONDUCTOR MATERIAL ON A GLASS SHEET
摘要 An apparatus for the deposition of semiconductor material on a glass sheet, including at least one vacuum chamber which includes a means for deposition of a semiconductor material on one or more glass sheets and a means for conveying the glass sheets inside the vacuum chamber; the conveyance means forms a continuous plane with the surface of the panels that is subjected to the deposition of conducting material.
申请公布号 EP2548219(A1) 申请公布日期 2013.01.23
申请号 EP20110705819 申请日期 2011.02.24
申请人 STRAL S.R.L. 发明人 RONCHI, MARCO
分类号 H01L21/677;B65G49/06 主分类号 H01L21/677
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