| 摘要 |
PURPOSE: A manufacturing method of HF with ultra high purity is provided to remove a trace amount of impurities in HF and manufacture HF with an ultra high purity by mixing the HF acid and F_2, KMnO_4, or H_2O_2 and reacting the same by using an ultrasonic vibrator. CONSTITUTION: A manufacturing method of HF with ultra high purity comprises steps of: adding F_2, KMnO_4, H_2O_2, or a mixture thereof to HF with general purity or high purity, increasing contact with impurities in the HF by performing ultrasonic vibration to the additives, and refining the mixture with distillation. When H_2O_2 is added, a reaction temperature is maintained in a range of -30°C to 10°C. |
