发明名称 DEVICE AND METHOD FOR DETACHING A PRODUCT SUBSTRATE FROM A CARRIER SUBSTRATE
摘要 The device has a flexible film (3) connected with a film frame (1), and comprised of an adhesive layer for holding a product substrate (4) in a contact surface section of the film. The film is connected with the film frame in a fixing section of the film. A tub-type solvent container is formed by the film frame and the film for holding a solvent or fluid agent for loosening a connection section (6). The product substrate and the connection section are held in the container. An application unit applies solvent in the container. A removal unit removes the substrate from a carrier substrate (2). An independent claim is also included for a method for removal of the product substrate from the carrier substrate.
申请公布号 KR20130009878(A) 申请公布日期 2013.01.23
申请号 KR20127032468 申请日期 2011.03.29
申请人 EV GROUP GMBH 发明人 LINDNER FRIEDRICH PAUL;BURGGRAF JURGEN
分类号 H01L21/02;H01L21/301 主分类号 H01L21/02
代理机构 代理人
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