| 摘要 |
PURPOSE: An electrolytic cell for producing NF3 gas is provided to smoothly discharge gas produced by preventing the formation of a dead space at the top. CONSTITUTION: An electrolytic cell for producing NF3 gas comprises an electrolyzer body(100), a top plate(200) which is coupled to close the top of the electrolyzer body and formed with a cathode coupling hole and an anode coupling hole, a cathode unit(300) which is coupled to the cathode coupling hole of the top plate with a packing through a coupling plate(30), an anode unit(400) which is coupled to the anode coupling hole with a packing through a coupling member(40), a diaphgram(500), and a cathodic and anodic gas vent unit(600,700) which are formed on the top plate and discharges cathodic and anodic gases.
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