发明名称 DEEP WORDLINE TRENCH TO SHIELD CROSS COUPLING BETWEEN ADJACENT CELLS FOR SCALED NAND
摘要 <p>A NAND flash memory structure with a wordline or control gate that provides shielding from Yupin effect errors and generally from potentials in adjacent strings of transistors undergoing programming operations with significant variations in potential. Each string has a first select gate (105), a plurality of floating gates (102), and a second select gate. The floating gates are formed between shallow trench isolation areas (104) and wordlines (106) extend across adjacent strings and extend between the floating gates into the shallow trench isolation areas thereby shielding the floating gates from variations in potential of adjacent memory cells.</p>
申请公布号 KR20050044868(A) 申请公布日期 2005.05.13
申请号 KR20047020775 申请日期 2003.06.09
申请人 SANDISK CORPORATION 发明人 CHIEN, HENRY;FONG, YUPIN
分类号 G11C16/04;G11C11/34;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):G11C16/04;H01L21/824 主分类号 G11C16/04
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