发明名称 |
Piezoelectric device, angular velocity sensor, and method of manufacturing a piezoelectric device |
摘要 |
<p>A piezoelectric device includes a piezoelectric film and an electrode film. The piezoelectric film is constituted of lead zirconium titanate represented by Pb 1+X (Zr Y Ti 1-Y )O 3+x , where X is 0 or more and 0.3 or less and Y is 0 or more and 0.55 or less, the piezoelectric film having a tension stress. The electrode film applies a voltage to the piezoelectric film.</p> |
申请公布号 |
EP2061101(A3) |
申请公布日期 |
2013.01.23 |
申请号 |
EP20080018395 |
申请日期 |
2008.10.21 |
申请人 |
SONY CORPORATION |
发明人 |
KOIKE, NOBUYUKI;TAMURA, TAKASHI |
分类号 |
H01L41/187;C04B35/491;G01C19/56;G01C19/5663;H01L41/113 |
主分类号 |
H01L41/187 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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