| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide which can enhance the stability of rectangular core structure, to extend its dimensional processing range, to improve its uniformity, and to prevent the occurrence of cracking and peeling by suppressing the stress generation to optical waveguide material and which has a low loss and a high reliability, and also to provide its manufacturing method. SOLUTION: A core shape having a rectangular cross-section is formed on a material substrate constituting a core layer by forming grooves by photo engraving and etching, apertures on the core shape are filled with clad material of a refractive index lower than that of the material substrate, a groove formation surface of the material substrate is bonded to a base substrate for supporting an optical waveguide structure via other clad material of a refractive index lower than that of the material substrate, thereafter, the material substrate is removed from the opposite side of the core shape, and the core shape remains on the base substrate. COPYRIGHT: (C)2005,JPO&NCIPI |
