发明名称 Particle beam generator with improved vacuum
摘要 The particle beam generator (10) has a housing (11) with two housing portions (12,14), where a beam generating medium (9) is adjusted along a beam axis (C1) within one housing portion for generating a particle beam (24). A beam passage opening (21a) connects an interior of the former housing portion with another interior of the latter housing portion, where the beam axis passes through the beam passage opening. A rotor (32) is arranged within the latter housing portion for rotation about a rotational axis (C2).
申请公布号 EP2549520(A1) 申请公布日期 2013.01.23
申请号 EP20120400028 申请日期 2012.07.20
申请人 ZOSEL, KARSTEN 发明人 ZOSEL, KARSTEN
分类号 H01J37/31;B23K15/10;H01J37/06;H01J37/16;H01J37/18;H01J37/315 主分类号 H01J37/31
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