| 摘要 |
A fluorescent X-ray analyzer for analyzing a sample in an inert gas atmosphere, wherein a spectral chamber need not be substituted with an inert gas, does not communicate with a sample chamber, and can provide a sufficiently intensive secondary X-ray and an analyzer having a long-life partition. The analyzer comprises a sample chamber (1) for storing a sample (4), an irradiation chamber (2) for storing an X-ray source (7) for applying a primary X-ray (6) to the sample (4) and communicating with the sample chamber (1), a spectral chamber (3) for storing a detection means (9) that spectrally separates and detects a secondary X-ray (8) generated from the sample (4), and a partition (10) disposed so as to partition the irradiation chamber (2) from the spectral chamber (3) and allowing the secondary X-ray (8) to pass therethrough, wherein the sample chamber (1) and the irradiation chamber (2) are substituted with an inert gas, and the spectral chamber (3) is vacuum-evacuated. |
