首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
FILM DEPOSITION APPARATUS WITH ORGANIC-MATERIAL VAPOR GENERATOR
摘要
申请公布号
EP2187708(B1)
申请公布日期
2013.01.23
申请号
EP20080830220
申请日期
2008.09.08
申请人
ULVAC, INC.
发明人
NEGISHI, TOSHIO
分类号
H05B33/10;C23C14/12;C23C14/22;C23C14/24;H01L51/50
主分类号
H05B33/10
代理机构
代理人
主权项
地址
您可能感兴趣的专利
ELECTRIC CABLE HARNESS FOR GAS FUEL SYSTEM AND METHOD OF PROVIDING ELECTRIC POWER SUPPLY FOR THE GAS FUEL SYSTEM
RECEPTION DEVICE, RECEPTION METHOD, TRANSMISSION DEVICE, AND TRANSMISSION METHOD
PROCESS FOR CAPTURING CO2 FROM A GAS STREAM
METHOD, APPARATUS, AND SYSTEM FOR ENERGY CONSERVATION OF FREQUENCY SPECTRUM RESOURCE SELF-OPTIMIZATION
CLEANING SYSTEM FOR CYLINDRO-PARABOLIC COLLECTORS AND METHOD ASSOCIATED WITH SAID SYSTEM
NON-AQUEOUS ELECTROLYTE SOLUTION, AND POWER STORAGE DEVICE IN WHICH NON-AQUEOUS ELECTROLYTE SOLUTION IS USED
FUEL INJECTION CONTROL DEVICE AND FUEL INJECTION CONTROL METHOD FOR INTERNAL COMBUSTION ENGINE
HYDROGEN GENERATING ELECTRODE
DRIVER CIRCUIT AND METHOD
TORQUE TRANSMISSION DEVICE AND METHOD FOR THE OPERATION THEREOF
FLEXIBLE PACKAGING MATERIAL
ELECTRODE STRUCTURE AND METHOD OF MANUFACTURE THEREOF
SYSTEM AND METHOD FOR CONSTRUCTING A NOISE REPLICA
FIXED DOSE PHARMACEUTICAL FORMULATIONS OF ANALGESIC AND ANTI-SPASMODIC DRUGS
STABLE TOPICAL PHARMACEUTICAL COMPOSITIONS COMPRISING GABAPENTIN
MICROELECTROMECHANICAL SYSTEM (MEMS) PACKAGE
DENTAL DRILL ADAPTER
METHOD FOR TRANSMITTING DATA BETWEEN TWO SUBSCRIBERS
LED LUMINAIRE COMPRISING A BENT OPTICAL WAVEGUIDE
LOCKING MECHANISM FOR ULTRASOUND CONDUCTIVE MEDIUM
