| 摘要 |
A vapour deposition process for the preparation of a phosphate compound comprises providing each component element of the phosphate compound separately as a vapour at a respective source, and co-depositing the component element vapours on a common substrate, wherein the component elements react on the substrate to form the phosphate compound. The phosphate compound is preferably a metal or mixed metal phosphate, and may be lithium iron phosphate. Each element is provided as a vapour using an appropriate source. Particularly preferred sources are an effusion cell source or electron beam evaporator source for the metal(s), a phosphorus cracking source for the phosphorus, and a plasma source for the oxygen. The phosphate compound may also include nitrogen (e.g. a phosphorus oxynitride such as LiPON) or sulfur. The stoichiometry of the phosphate compound may be controlled by controlling the rate of deposition of each component element onto the substrate. The process can be used in the manufacture of a battery, particularly a lithium ion battery. |
