DEVICE COMPRISING AN ENCAPSULATED MICROSYSTEM AND PRODUCTION METHOD THEREOF

摘要

The invention relates to a method of producing a device (44) comprising an encapsulated microsystem (10'). The device produced in accordance with the invention takes the form of a flat plate and the microsystem (10') is embedded in said plate. The inventive method consists in producing a component that can form the basis of other microtechnology methods. Moreover, said method enables electronic components (36, 38) to be cointegrated during the production of the device (44). The inventive device (44) is particularly suitable for MEMS and, above all, radio frequency resonators.