TEMPERATURE DETECTING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A temperature detecting apparatus, a substrate processing apparatus, and a method for manufacturing a semiconductor device are provided to suppress the restriction of a thermal expansion of a thermocouple wire by forming a buffer region on the lower side of an insulation tube. CONSTITUTION: An insulation tube(32) includes a through hole in a vertical direction. A thermocouple wire(22) is inserted into the through hole of the insulation tube. The thermocouple wire includes a thermocouple junction part(23). A buffer region is formed on the lower side of the insulation tube. A thermocouple wire support unit(24) is installed in the thermocouple wire between the thermocouple junction part and the upper section of the insulation tube.