| 摘要 |
<p>PURPOSE: An imprint apparatus and an article manufacturing method are provided to improve throughput by using a mold holding support unit and a substrate holding support unit. CONSTITUTION: A mold holding support unit(3) supports a mold. A substrate holding support unit(4) supports a substrate. A first(14) and a second driver unit drive the mold holding support unit and the substrate holding support unit. A first and a second position sensor detect the position of the substrate holding support unit and the mold holding support unit. A control unit controls the first and the second drive unit.</p> |
