| 摘要 |
PURPOSE: An electrode bar for manufacturing polysilicon and an exchanging method of a damaged part are provided to cost effectively extend the life of the electrode bar. CONSTITUTION: An assembling groove(25) is formed at the upper end part of a boundary bar(20) which is the easily damaged part of an electrode bar. A female screw part(26) is formed on the inner circumference of the assembling groove. An upper plate(21) and an upper supporting rod(30) of the boundary bar are integrated. The size of the upper plate corresponds to the size of the assembling groove. A male screw part(27) is formed at the outer circumference of the upper plate. The upper plate and the boundary bar are combined. |
