PURPOSE: A super-high frequency probe is provided to obtain the accurate plasma density even in a discharging plasma condition difficult to measure by using the same type of radiation antenna with the existing rod antenna. CONSTITUTION: A super-high frequency probe(100) comprises a rod shaped radiation antenna(112) for emitting super high frequency which scans a frequency inside a plasma and a receiving antenna(114) which receives an electromagnetic wave radiated from the radiation antenna. The receiving antenna is inserted inside the plasma. The receiving antenna receives an electromagnetic wave radiated from the radiation antenna with a loop-shaped which covers the surrounding of the radiation antenna. A plasma is formed by an energy approval unit(136) inside the chamber. A power(132) can provide power to the energy approval unit. A chamber(131) can include a substrate holder(138), and a substrate(137) mounted on the substrate holder. [Reference numerals] (AA) Plasma
