Corrosion-resistant member, treatment apparatus and sample treatment method using the member, and method for manufacture of corrosion-resistant member

摘要

Disclosed is a corrosion resistant member comprising a sintered material having an α-Al2O3 crystal and an YAG (yttrium-aluminum-garnet) crystal. The corrosion resistant member contains metal elements, 70 to 98% by mass (inclusive) of Al in terms of Al2O3 and 2 to 30% by mass of Y in terms of Y2O3. The corrosion resistant member has a peak intensity ratio I116/I104 within the range from 0.94 to 1.98, preferably. 2.21 or higher, wherein I116 and I104 represent peak intensities attributed to the (116) face and the (104) face, respectively, of an α-Al2O3 crystal as measured by X-ray diffractometry on its surface layer.