发明名称 CLEANER FOR MASK
摘要 PURPOSE: An apparatus for cleaning a mask is provided to improve cleaning efficiency by using a chemical reaction of a cleaning solution and bubbles. CONSTITUTION: A mask(1) is dipped in a cleaning solution(11) of a cleaning bath(10). A pair of bubble nozzle units(20) includes a pair of pipes, nozzles and a vortex forming part. A pair of bubble nozzle units is installed under the mask. A pair of pipes is formed in parallel. The nozzles are prepared in each pipe. The nozzle sprays bubbles on the front side and the rear side of the mask. The vortex forming part is inserted into each pipe. The vortex forming part circulates air.
申请公布号 KR101224904(B1) 申请公布日期 2013.01.22
申请号 KR20110128381 申请日期 2011.12.02
申请人 K.C.TECH CO., LTD. 发明人 JUNG, DONG JIN;CHO, MOON GI
分类号 G02F1/13;B08B3/00;B08B3/12;H01L21/304 主分类号 G02F1/13
代理机构 代理人
主权项
地址