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发明名称
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
摘要
申请公布号
KR20130008641(A)
申请公布日期
2013.01.22
申请号
KR20127032510
申请日期
2011.04.08
申请人
ASML NETHERLANDS B.V.
发明人
ONVLEE JOHANNES;DEKKER ALBERT;SPIERDIJK JOHANNUS;DE MAN HENDRIK
分类号
G03F7/20;G02B27/00
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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