| 摘要 |
The invention relates to a method for calibrating a high frequency measurement device (HF measurement device) comprising N measurement ports, where N is an integer >= 1, in particular a vector network analyser, for determining scattering parameters of a measurement object with an n-port measurement, where n is an integer >= 1, wherein a high frequency test signal (HF test signal) is fed into a first electrical lead connected to the measurement object or to a circuit comprising the measurement object, wherein for each port, an HF signal running on a second electrical lead, in particular a planar lead, connected to the measurement object is coupled out from the second electrical lead at a first coupling position and at a second coupling position placed at a distance from the first coupling position, wherein from the two HF signals coupled out at the two coupling positions, in each port, for each measuring site or coupling site, an amplitude and/or a phase, relative to the HF test signal, of an HF signal running on the second electrical lead to the measurement object and of an HF signal running on the second electrical lead away from the measurement object are determined and therefrom, scattering parameters of the measurement object are calculated. Herein for at least one of the ports of the HF measurement device, the HF signal running on the second electrical lead is coupled out at at least three coupling positions placed at a distance from one another, wherein for each pairwise combination of the at least three coupling positions, using a predetermined calibration method with at least one calibration standard as the measurement object, the scattering parameter of which is known, at least one scattering parameter for at least one frequency of the HF test signal is determined, wherein the values determined for all pairwise combinations at one frequency of the HF test signal for the at least one scattering parameter are compared with the known value for the calibration standard for this at least one scattering parameter, wherein that pairwise combination of coupling positions in which the difference between the value of the determined scattering parameter and that known for the calibration standard is at a minimum, is stored as the preferred first and second coupling position for this frequency for measurements on unknown measurement objects.
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