| 发明名称 |
Method for machining a workpiece on a workpiece support |
| 摘要 |
A workpiece machining method includes attaching a workpiece to a workpiece support with the aid of joining means. The workpiece and the workpiece support are joined to one another by an annular joining means. The composite produced is machined. The machined workpiece is separated from the workpiece support.
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| 申请公布号 |
US8357588(B2) |
申请公布日期 |
2013.01.22 |
| 申请号 |
US201113032618 |
申请日期 |
2011.02.22 |
| 申请人 |
INFINEON TECHNOLOGIES AG;BRADL STEPHEN;GROMMES WALTHER;KROENINGER WERNER;MELZL MICHAEL;SCHWAIGER JOSEF;STACHE THILO |
发明人 |
BRADL STEPHEN;GROMMES WALTHER;KROENINGER WERNER;MELZL MICHAEL;SCHWAIGER JOSEF;STACHE THILO |
| 分类号 |
H01L21/30;H01L21/68 |
主分类号 |
H01L21/30 |
| 代理机构 |
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