Method for the manufacture of an active matrix, corresponding electro-optical display devices and mask

摘要

In a method for the manufacture of an active matrix for an electro-optical display device, the active zone exposure fields CH 1 , CH 2 are obtained by the transfer of an active zone mask in such a way that there is a non-null overlap zone zl, zr, zt, zb between two successive exposure fields. The active zone mask is exposed a first time. This mask is positioned for the next exposure so as to overlap the first exposed field on a certain width F₁, F₂. In the overlap zones, an exposure of the mask provides only a part of the patterns.