发明名称 |
Polishing pad and method of manufacture |
摘要 |
The present invention relates to a method of manufacturing a polishing pad with embedded polymeric capsules useful for planarizing a substrate in a CMP process using a polishing composition. The method reduces non-uniformity of the polishing pad due to capsule floating, differential heating and capsule expansion by the use of novel capsule materials. The method also increases the efficiency of the manufacturing process by reducing the number of defective products and reducing waste.
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申请公布号 |
US8357027(B2) |
申请公布日期 |
2013.01.22 |
申请号 |
US20060494050 |
申请日期 |
2006.07.27 |
申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.;SAIKIN ALAN H. |
发明人 |
SAIKIN ALAN H. |
分类号 |
B24B7/22;B24B37/20;B24D99/00;C08J3/20;H01L21/304 |
主分类号 |
B24B7/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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