| 摘要 |
PURPOSE: A device for measuring a flow rate and a method for measuring a flow rate using the same are provided to precisely measure a flow rate of a measurement object gas such as a by-product gas. CONSTITUTION: A device for measuring a flow rate comprises a main inflow pipe(110), an inflow concentration meter(140), an auxiliary inflow pipe(120), and an exhaustion concentration measuring unit(150). A measurement object gas flows into the main inflow pipe. The inflow concentration meter measures the concentration of a component of the measurement object gas flowing into the main inflow pipe. An auxiliary gas flows into the auxiliary inflow pipe at a preset flow rate. A gas in which the measurement object gas and the auxiliary gas are mixed is exhausted through an exhaustion pipe. The exhaustion concentration measuring unit measures the concentration of one component of the mixed gas. |
