发明名称 NON-CONTACT THIN BOARD TRANSFER SYSTEM
摘要 <p>PURPOSE: A non-contact thin board transfer system is provided to prevent the deformation and distortion of a thin plate and to perform a smooth operation. CONSTITUTION: A transferring roller(220) is arranged along the transferring direction of a thin plate(210). A rotary shaft(250) of the transferring roller is obliquely arranged from the transferring direction of the thin plate. Multiple transferring rollers are arranged in the upper and lower surfaces of the thin plate. A monitoring unit is arranged in the side of the transferring rollers. A control unit generates a control signal to control the rotation speed of the transferring roller. [Reference numerals] (AA) Transferring direction</p>
申请公布号 KR20130008365(A) 申请公布日期 2013.01.22
申请号 KR20110069070 申请日期 2011.07.12
申请人 INDUSTRY-ACADEMIC COOPERATION FOUNDATION, DANKOOKUNIVERSITY 发明人 KIM, YOUNG SIK;LEE, CHANG WON;HAN, EUN JOO
分类号 H01L21/677;B65G49/07;H01L21/50 主分类号 H01L21/677
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