| 摘要 |
<p>PURPOSE: An apparatus for changing the feeding direction of a wafer is provided to prevent the damage of the wafer generated when the direction of the wafer is changed. CONSTITUTION: A first conveyor transfers a wafer. A lifting device(100) is ascended and descended. A transfer apparatus(200) is connected to the lifting device. A driving pulley is rotatably connected to the shaft of a transferring unit. A plurality of transferring pulleys is separated from each other.</p> |
