MONITORING SYSTEM AND METHOD THEREOF

摘要

PURPOSE: A monitoring system and a method thereof are provided to extend the operation time of an expensive wafer transfer robot and improve the productivity by checking abnormality of component parts based on the frequency characteristic of component parts comprising a wafer transfer robot. CONSTITUTION: A monitoring system(10) includes a wafer transfer robot(100), a measurement system(200), and a mobile terminal(300). A wafer transfer robot is rotated based on a rotation power generated by the rotation power part included in a body, and includes multiple arms formed contract or expand in the body. A measurement system measures a sound signal generated in the installed location when a wafer transfer robot operates, and transmit information of component parts of a wafer transfer robot corresponding to the measured location of the sound signal to a mobile terminal. A mobile terminal checks abnormality of component parts of a wafer transfer robot corresponding to the measured location of the sound signal based on the information of component parts of a wafer transfer robot, and outputs an alarm signal including information of component parts of a wafer transfer robot in which abnormality is detected. [Reference numerals] (100) Wafer transfer robot; (200) Measurement system; (300) Mobile terminal