| 发明名称 |
Noninvasive method for characterizing and identifying embedded micropatterns |
| 摘要 |
The invention relates to a method for noninvasively characterizing embedded micropatterns which are hidden under the surface of a wafer down to 100 mum. The micropatterns are identified with reference micropatterns from a previously produced reference library with the aid of their specific ellipsometric parameters.
|
| 申请公布号 |
US7262837(B2) |
申请公布日期 |
2007.08.28 |
| 申请号 |
US20040877262 |
申请日期 |
2004.06.25 |
| 申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
GUITTET PIERRE-YVES;MANTZ ULRICH;MARX ECKHARD |
| 分类号 |
G01N1/00;B81C99/00;G01B11/06;G01J4/00;G01N21/21 |
主分类号 |
G01N1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
