MODULE FOR SUPPLYING CLEANING LIQUID

摘要

PURPOSE: A wash liquid supply module which includes a combining unit is provided to easily process nozzle holes which combine with a nozzle. CONSTITUTION: A wash liquid supply module comprises a connecting unit(100) and a nozzle pipe(200). The connecting unit connects a main pipe and the nozzle pipe. The main pipe provides space in which washing solution flows. One end of the nozzle pipe is connected to the connecting unit and supplies the washing liquid from the main pipe to a substrate. The other end of the nozzle pipe is shut tightly. The nozzle pipe includes a flat portion(210). The plateau has a plurality of nozzle holes(220) in the substrate arrange direction. The connecting unit includes a female unit and a male unit.