发明名称 MEMORY DEVICE AND MANUFACTURING METHOD THEREOF
摘要 The present invention relates to a memory device having 4F2 size cells and a method for fabricating the same. The memory device comprises plural word lines arranged parallel to each other in one direction, plural bit lines arranged parallel to each other, and plural memory cells having a transistor that fills a groove between two adjoining memory cells in a direction of the bit lines. A side wall between the two adjoining memory cells is simultaneously covered by an insulating film formed between the gate terminal and the two memory cells. The gate terminal is connected electrically to a word line, drain terminals of two adjoining memory cells are connected electrically to a bit line, and the gate and drain terminals are alternately arranged. One of the plural memory cells is buried in the substrate, and is electrically connected with a substrate or a well formed in the substrate.
申请公布号 KR101218904(B1) 申请公布日期 2013.01.21
申请号 KR20100119500 申请日期 2010.11.29
申请人 发明人
分类号 H01L21/8242;H01L27/10;H01L27/108 主分类号 H01L21/8242
代理机构 代理人
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