| 摘要 |
PROBLEM TO BE SOLVED: To irradiate a soft X-ray correctly in a narrow gap immediately after lifting up a glass substrate. SOLUTION: The soft X-ray from a soft X-ray static eliminator 14 is introduced into a spacing (d), it is detected by a soft X-ray optical axis monitor 16, an optical axis adjustment is performed by adjusting a mounting position adjusting means 15 with the detected output. Then, based on the information of a database 19, static elimination is performed while a control unit 17 controls a space adjusting means 13. Moreover, the static elimination can be performed by controlling the spacing (d) by the spacing adjusting means 13 while judging the elimination status by the control unit 17 whether the electro-static charge voltage potential measured by an electrometer 18 is within a allowed value. COPYRIGHT: (C)2007,JPO&INPIT |
