| 摘要 |
PURPOSE: A door packing structure for a chamber is provided to precisely maintain airtightness for a long time because a packing unit by which an accommodation space part of a chamber is closed in case of closing a door is arranged in the door and part of the packing unit is compressed to the surface of the chamber by supplied pressure. CONSTITUTION: A door packing structure for a chamber comprises a chamber, a door, a packing unit(300), and a pressure supply part(400). The door opens and closes an accommodation space part of the chamber by a clamp. The packing unit is attached to the surface of the chamber while moving by supplied pressure so that between the chamber and the door can be sealed. The pressure supply part supplies pressure to the packing unit. The packing unit comprises a packing block(310) and a packing(320). The packing block is arranged along the inner edge of the door reaching with the chamber. The packing block has a pressure chamber opened to one side. Part of the packing is projected to the outside through the opened part of the pressure chamber by the pressure supplied from the pressure supply part. The packing is attached to the surface of the chamber by the supplied pressure in a state where the door is closed to seal the accommodation space part. Between the door and the chamber is sealed. |
