摘要 |
PURPOSE: A sensor chip, a sensor cartridge, and an analysis apparatus are provided to improve the sensitivity of a sensor and to identify target materials from a Raman spectroscopy spectrum. CONSTITUTION: A sensor chip comprises a base member(10), multiple first protrusions(11), lower supporters(10a), second protrusions(12), third protrusions(13), and a diffraction grid(9). The base member has a flat part(10s). The first protrusions are arranged on the flat part of the base member. The lower supporters are located between the first protrusions. The second protrusions are formed on the top of the first protrusions. The third protrusions are formed in the lower supporters. The diffraction grid has a metal surface and is formed on the flat part of the base member. A target material is arranged on the diffraction grid. |