| 摘要 |
PURPOSE: A heater module of an atomic layer deposition apparatus is provided to accurately measure the temperature of substrate by using a temperature measuring part inserted in a heater module. CONSTITUTION: A heater module is formed in the lower part of a susceptor. A heating wire(145) is formed in the upper part of a heater block(141). A temperature measuring part(147) is inserted into the heater block. The temperature measuring part measures the heat emitted from the heating wire. A recess part is formed in the upper part of the heater block.
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